Tegal to Present at the Chiba University Fourth International Symposium on Acoustic Wave Devices (Business Wire via Yahoo! Finance)

2 March 2010, 1:01 pm

PETALUMA, Calif.----Tegal Corporation, an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, will present an invited paper on a “New Generation of S-Gun Magnetron for AlN Reactive Sputtering” at the Chiba University Fourth International Symposium on Acoustic Wave Devices.... Read More »

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